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Extreme ultraviolet lithography
Results: 188

#	Item
161	EUV: From Development to HVM Sam Sivakumar Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2013-07-08 00:22:05 Technology Extreme ultraviolet 32 nanometer Lithography Extreme ultraviolet lithography Electromagnetic radiation Visual arts
162	2013 International Workshop on EUV Lithography Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2013-07-15 21:14:04 Ultraviolet 22 nanometer Electromagnetic radiation Extreme ultraviolet lithography Extreme ultraviolet
163 $Technology / Extreme ultraviolet lithography / Photomask / Microtechnology / Phase-shift mask / Immersion lithography / Diffraction / Camera lens / Reticle / Materials science / Optics / Physics$	Photomask BACUS—The international technical group of SPIE dedicated to the advancement of photomask technology. Add to Reading List Source URL: spie.org Language: English - Date: 2014-01-16 09:38:11 Technology Extreme ultraviolet lithography Photomask Microtechnology Phase-shift mask Immersion lithography Diffraction Camera lens Reticle Materials science Optics Physics
164	EUV Lithography at Insertion and Beyond Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2012-07-01 20:01:42 Electronics 32 nanometer 45 nanometer Extreme ultraviolet Intel 90 nanometer 65 nanometer Extreme ultraviolet lithography Electronic engineering Technology
165	High Power Pulsed CO2 Laser for EUV Lithography Tatsuya Ariga, Hideo Hoshino, Taisuke Miura and Akira Endo EUVA (Extreme Ultraviolet Lithography System Development Association), Add to Reading List Source URL: www.gigaphoton.com Language: English - Date: 2012-03-28 12:56:06 Physics Laser science Acronyms Laser Photonics Q-switching Fiber laser Nd:YAG laser Optical amplifier Optics Technology Gas lasers
166	IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 34, NO. 5, OCTOBER[removed] Add to Reading List Source URL: ab-abp-rlc.web.cern.ch Language: English - Date: 2006-12-22 13:39:12 Condensed matter physics Albert Einstein Energy conversion Photoelectric effect Photovoltaics Work function Space weather Plasma Extreme ultraviolet lithography Physics Science Spectroscopy
167	Microsoft PowerPoint - BEUV Dublin1.3ho .ppt Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2010-12-02 11:22:35 22 nanometer 16 nanometer Ultraviolet Extreme ultraviolet 32 nanometer Multiple patterning 11 nanometer Angular resolution Next-generation lithography Electromagnetic radiation Extreme ultraviolet lithography Photolithography
168	VOLUME 87, NUMBER 2 PHYSICAL REVIEW LETTERS Add to Reading List Source URL: www.physik.uni-kl.de Language: English - Date: 2005-07-21 08:27:04 Surface chemistry Colloidal chemistry Atomic physics Spectroscopy Materials science Extreme ultraviolet lithography Photoemission spectroscopy Extreme ultraviolet Adsorption Chemistry Physical chemistry Physics
169	FLYER_EUV_EV_LASER2005.CDR Add to Reading List Source URL: www.llg-ev.de Language: English - Date: 2009-05-20 05:50:11 Acronyms Extreme ultraviolet Ultraviolet radiation Nd:YAG laser Laser Xenon Yttrium aluminium garnet Ultraviolet Extreme ultraviolet lithography Electromagnetic radiation Optics Optical materials
170	Development of the Extreme Ultraviolet Spectrometer: EXCEED Go Murakami, Kazuo Yoshioka, Atsushi Yamazaki, Tomoki Kimura Add to Reading List Source URL: pparc.gp.tohoku.ac.jp Language: English* - Date: 2013-05-17 04:18:38 Laboratory equipment Spectroscopy Monochromator Extreme ultraviolet lithography Spectrometer Extreme ultraviolet Microchannel plate detector Ultraviolet X-ray astronomy detector Electromagnetic radiation Science Chemistry

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